3M氟化液FC-40是无色透明全氟化学品,具有良好的化学惰性、电气绝缘性能、热传导性和*特的*表面张力广泛应用于半导体制造厂作为热传导介质。其液体温度范围为-57°C 至 155°C,主要应用于蚀刻设备、离子注入设备、测试设备及其他设备。因为FC-40是单一组分,所以其成分不好出现降解或者过期。FC-40沸点高,其随时间的挥发也比较少。 3M Fluorinert Electronic Liquid FC-40 is a clear, colorless, thermally stable, fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-57°C to 155°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-40 is primarily a single compound, its composition will not shift or fractionate with time. This keeps fluid loss to a minimum and insures that transport properties will not change with time.